In semiconductor manufacturing equipment, from wafer etching machines to inspection tools, cooling fans are key components that keep temperatures stable and processes running smoothly. Choosing the right fan is an engineering decision that impacts machine performance, uptime, and even product yield. Inadequate cooling can lead to thermal instability, reduced equipment lifespan, and costly downtime.
Selecting a cooling fan for semiconductor equipment requires balancing performance with environmental and operational demands. With so much variety in fan and blower selection, engineers must consider several key factors.
Meeting the Required Airflow
Semiconductor tools may require 1000+ CFM depending on heat load. When selecting a fan for semiconductor manufacturing, engineers must ensure it can deliver the required airflow (CFM) while overcoming the system’s static pressure. This is especially important when dealing with dense filters or heat exchangers.
Always check performance curves to ensure the fan meets the required operating point. If you're unsure, consult with a thermal engineer and provide your airflow and pressure requirements to identify a compatible fan.
Cleanroom Compatibility and ESD Safety
Cleanroom environments demand fans with low particle emission. ESD-safe construction is essential to prevent damage to sensitive components from contamination and electrostatic discharge. Look for conductive materials, proper grounding, and fans with brushless motors.
Power Input and Speed Control
Fans must match the system’s electrical supply. Rotron fans support 12–270 VDC and 115 to 200 VAC, single or 3 phase, 50-60 Hz, with options for variable frequency input. It’s also essential to match the fan’s power input to the available supply and consider speed control options such as
variable frequency drives for dynamic performance tuning.
Noise Reduction and Energy Savings
A variable frequency drive can be a valuable addition to a cooling system. The ability to control the speed of the fan to make the cooling requirements can not only reduce the noise from the fan, but it can also save on energy.
Fan Size
Size is also an important consideration. Many conventional blowers are much larger than Rotron’s axial fans, that typically range from 1″ to 14″ in diameter and blowers extending up to 36″ in length. With space being an important commodity, it’s crucial to find a cooling solution that is powerful enough to fit your system’s needs, without taking up too much space.
Leading Semiconductor manufacturers include Rotron fans in their systems due to the small form factor compared to other air-cooling methods.
High MTBF
Finally, reliability of the cooling system is also a major consideration. When fans are expected to run continuously, engineers look for fans that have a pedigree of high reliability. Fans with high MTBF ratings, such as those exceeding 50,000 hours, are ideal for continuous 24/7 operation. For added reliability, consider fans with built-in speed sensors or fault detection outputs to enable proactive maintenance.
With the right fan in place, engineers can maintain optimal thermal conditions, protect sensitive components, and ensure uninterrupted operation in demanding semiconductor environments.
AMETEK Rotron’s Fans for Semiconductor Manufacturing Equipment
AMETEK Rotron has a wide variety of proven cooling solutions suitable for semiconductor manufacturing equipment. If you’d like to learn more about how our fans can improve the cooling efficiency in your system, get in touch with us below.